Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10466585 | Pellicle and pellicle assembly | David Ferdinand Vles, Erik Achilles Abegg, Aage Bendiksen, Derk Servatius Gertruda Brouns, Pradeep K. Govil +9 more | 2019-11-05 |
| 10241418 | Method and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process, lithographic processing system including diagnostic apparatus | Marc Hauptmann, Dylan John David Davies, Naoko Tsugama, Richard Joseph Bruls, Kornelis Tijmen Hoekerd +5 more | 2019-03-26 |