Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10437156 | Lithographic apparatus and surface cleaning method | Takeshi Kaneko | 2019-10-08 |
| 10241418 | Method and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process, lithographic processing system including diagnostic apparatus | Marc Hauptmann, Dylan John David Davies, Paul Janssen, Naoko Tsugama, Richard Joseph Bruls +5 more | 2019-03-26 |
| 10185223 | Lithographic apparatus and surface cleaning method | Takeshi Kaneko | 2019-01-22 |