Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10324383 | Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus | Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Michael L. Nelson, Geoffrey O'Connor, Michael Andrew Chieda +1 more | 2019-06-18 |