Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10488768 | Beat patterns for alignment on small metrology targets | Paul Christiaan Hinnen, Hugo Augustinus Joseph Cramer, Anagnostis Tsiatmas, Mariya Vyacheslavivna Medvedyeva | 2019-11-26 |
| 10394135 | Method and apparatus for measuring a parameter of a lithographic process, computer program products for implementing such methods and apparatus | Hugo Augustinus Joseph Cramer | 2019-08-27 |
| 10317805 | Method for monitoring a characteristic of illumination from a metrology apparatus | Jolanda Theodora Josephina Schmetz-Schagen, Hugo Augustinus Joseph Cramer, Armand Eugene Albert Koolen | 2019-06-11 |