Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10488768 | Beat patterns for alignment on small metrology targets | Bastiaan Onne Fagginger Auer, Paul Christiaan Hinnen, Hugo Augustinus Joseph Cramer, Mariya Vyacheslavivna Medvedyeva | 2019-11-26 |
| 10481503 | Method and apparatus for measuring a parameter of a lithographic process, substrate and patterning devices for use in the method | Maurits Van Der Schaar, Youping Zhang, Hendrik Jan Hidde Smilde, Adriaan Johan Van Leest, Alok Verma +3 more | 2019-11-19 |
| 10453758 | Method and apparatus to determine a patterning process parameter using an asymmetric optical characteristic distribution portion | Adriaan Johan Van Leest, Paul Christiaan Hinnen, Elliott Gerard McNamara, Alok Verma, Thomas Theeuwes +1 more | 2019-10-22 |