Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10416567 | Illumination system and metrology system | Johannes Matheus Marie De Wit, Kim Gerard Feijen, Anko Jozef Cornelus Sijben, Henricus Martinus Johannes Van De Groes | 2019-09-17 |
| 10403471 | Systems and methods for charged particle beam modulation | Ehud Shaked | 2019-09-03 |