Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10459347 | Inspection method, inspection apparatus and illumination method and apparatus | Dirk Ewoud Boonzajer Flaes, Kjeld Sijbrand Eduard Eikema | 2019-10-29 |
| 10386735 | Lithographic apparatus alignment sensor and method | Simon Gijsbert Josephus Mathijssen, Arie Jeffrey Den Boef, Nitesh Pandey, Patricius Aloysius Jacobus Tinnemans, Kjeld Sijbrand Eduard Eikema | 2019-08-20 |