Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10342108 | Metrology methods, radiation source, metrology apparatus and device manufacturing method | Alexey Olegovich POLYAKOV, Richard Quintanilha, Vadim Yevgenyevich Banine | 2019-07-02 |
| 10180630 | Illumination system for a lithographic or inspection apparatus | Teunis Willem Tukker, Nitesh Pandey | 2019-01-15 |