Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10342108 | Metrology methods, radiation source, metrology apparatus and device manufacturing method | Alexey Olegovich POLYAKOV, Vadim Yevgenyevich Banine, Coen Adrianus Verschuren | 2019-07-02 |
| 10254644 | Metrology methods, metrology apparatus and device manufacturing method | Nitish Kumar | 2019-04-09 |
| 10222709 | Metrology method, metrology apparatus and device manufacturing method | — | 2019-03-05 |