Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10416555 | Lithographic patterning process and resists to use therein | Sander Frederik Wuister, Oktay Yildirim, Gijsbert Rispens | 2019-09-17 |
| 10342108 | Metrology methods, radiation source, metrology apparatus and device manufacturing method | Richard Quintanilha, Vadim Yevgenyevich Banine, Coen Adrianus Verschuren | 2019-07-02 |