Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10481510 | Graphene spectral purity filter | Andrei Mikhailovich Yakunin, Erik Roelof Loopstra, Harmen Klaas Van Der Schoot, Lucas Henricus Johannes Stevens, Maarten Van Kampen | 2019-11-19 |
| 10422691 | Radiation sensor apparatus | Willem Jakobus Cornelis Koppert, Han-Kwang Nienhuys, Ruud Martinus Van Der Horst | 2019-09-24 |
| 10362665 | Methods and apparatus for optical metrology | Petrus Wilhelmus SMORENBURG, Gerrit Jacobus Hendrik Brussaard | 2019-07-23 |
| 10342108 | Metrology methods, radiation source, metrology apparatus and device manufacturing method | Alexey Olegovich POLYAKOV, Richard Quintanilha, Coen Adrianus Verschuren | 2019-07-02 |
| 10228615 | Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane | Andrey Nikipelov, Jozef Petrus Henricus Benschop, Arjen Boogaard, Florian Didier Albin Dhalluin, Alexey Sergeevich Kuznetsov +5 more | 2019-03-12 |