Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10228615 | Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane | Andrey Nikipelov, Vadim Yevgenyevich Banine, Arjen Boogaard, Florian Didier Albin Dhalluin, Alexey Sergeevich Kuznetsov +5 more | 2019-03-12 |