Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10394143 | Topography measurement system | Nitesh Pandey, Arie Jeffrey Den Boef, Willem Richard Pongers, Paulus Antonius Andreas Teunissen | 2019-08-27 |
| 10295916 | EUV source chamber and gas flow regime for lithographic apparatus, multi-layer mirror and lithographic apparatus | Andrey Sergeevich TYCHKOV, Willem Van Schaik | 2019-05-21 |
| 10222703 | Lithographic apparatus and method | Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Markus Franciscus Antonius Eurlings, Hendrikus Robertus Marie Van Greevenbroek, Paul Van Der Veen +2 more | 2019-03-05 |