Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10474039 | Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method | Paul Christiaan Hinnen, Simon Gijsbert Josephus Mathijssen, Maurits Van Der Schaar, Arie Jeffrey Den Boef | 2019-11-12 |
| 10416577 | Position measuring method of an alignment target | Ralph Brinkhof, Simon Gijsbert Josephus Mathijssen, Vassili Demergis, Bartolomeus Petrus Rijpers | 2019-09-17 |