Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10459354 | Lithographic apparatus and lithographic projection method | Kevin VAN DE RUIT, Bart Dinand Paarhuis, Jean-Philippe Xavier Van Damme, Cornelis Melchior BROUWER | 2019-10-29 |
| 10444647 | Methods and apparatus for determining the position of a target structure on a substrate, methods and apparatus for determining the position of a substrate | Franciscus Godefridus Casper Bijnen, Augustinus Hubert Maria Boshouwers | 2019-10-15 |
| 10423081 | Reticle cooling by non-uniform gas flow | Thomas Venturino, Geoffrey Alan Schultz, Daniel N. Galburt, Daniel Nathan Burbank, Santiago E. DELPUERTO +3 more | 2019-09-24 |