Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10495986 | Patterning device cooling system and method of thermally conditioning a patterning device | Hakki Ergün Cekli, Güneş Nakibo{hacek over (g)}lu, Frank Johannes Jacobus Van Boxtel, Richard Johannes Franciscus Van Haren | 2019-12-03 |
| 10459354 | Lithographic apparatus and lithographic projection method | Kevin VAN DE RUIT, Bart Dinand Paarhuis, Johannes Onvlee, Cornelis Melchior BROUWER | 2019-10-29 |
| 10394139 | Patterning device cooling apparatus | Güneş Nak{dot over (i)}bo{hacek over (g)}lu, Lowell Lane Baker, Ruud Hendrikus Martinus Johannes Bloks, Hakki Ergün Cekli, Geoffrey Alan Schultz +3 more | 2019-08-27 |