Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10495986 | Patterning device cooling system and method of thermally conditioning a patterning device | Hakki Ergün Cekli, Frank Johannes Jacobus Van Boxtel, Jean-Philippe Xavier Van Damme, Richard Johannes Franciscus Van Haren | 2019-12-03 |