Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10423081 | Reticle cooling by non-uniform gas flow | Thomas Venturino, Daniel N. Galburt, Daniel Nathan Burbank, Santiago E. DELPUERTO, Herman Vogel +3 more | 2019-09-24 |
| 10394139 | Patterning device cooling apparatus | Güneş Nak{dot over (i)}bo{hacek over (g)}lu, Lowell Lane Baker, Ruud Hendrikus Martinus Johannes Bloks, Hakki Ergün Cekli, Laurentius Johannes Adrianus Van Bokhoven +3 more | 2019-08-27 |