Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10423081 | Reticle cooling by non-uniform gas flow | Thomas Venturino, Geoffrey Alan Schultz, Daniel N. Galburt, Daniel Nathan Burbank, Santiago E. DELPUERTO +3 more | 2019-09-24 |
| 10394139 | Patterning device cooling apparatus | Güneş Nak{dot over (i)}bo{hacek over (g)}lu, Lowell Lane Baker, Ruud Hendrikus Martinus Johannes Bloks, Hakki Ergün Cekli, Geoffrey Alan Schultz +3 more | 2019-08-27 |
| 10281830 | Patterning device cooling systems in a lithographic apparatus | Christopher Charles Ward, Marc Léon Van Der Gaag, Johan Gertrudis Cornelis Kunnen | 2019-05-07 |
| 10222713 | Patterning device cooling apparatus | Ruud Hendrikus Martinus Johannes Bloks, Günes NAKIBOGLU, Marinus Jan Remie, Johan Gertrudis Cornelis Kunnen | 2019-03-05 |