Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10423081 | Reticle cooling by non-uniform gas flow | Thomas Venturino, Geoffrey Alan Schultz, Daniel N. Galburt, Daniel Nathan Burbank, Santiago E. DELPUERTO +3 more | 2019-09-24 |
| 10331047 | Lithographic apparatus and device manufacturing method | Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +8 more | 2019-06-25 |