SS

Shau-Lin Shue

TSMC: 24 patents #35 of 2,832Top 2%
Overall (2017): #1,020 of 506,227Top 1%
24
Patents 2017

Issued Patents 2017

Showing 1–24 of 24 patents

Patent #TitleCo-InventorsDate
9837310 Method of manufacturing a semiconductor device Chao-Hsien Peng, Chi-Liang Kuo, Hsiang-Huan Lee 2017-12-05
9831117 Self-aligned double spacer patterning process Yung-Hsu Wu, Tsung-Min Huang, Cheng-Hsiung Tsai, Chung-Ju Lee, Tien-I Bao 2017-11-28
9818644 Interconnect structure and manufacturing method thereof Shin-Yi Yang, Hsi-Wen Tien, Ming-Han Lee, Hsiang-Huan Lee 2017-11-14
9799558 Method for forming conductive structure in semiconductor structure Hsi-Wen Tien, Carlos H. Diaz, Chung-Ju Lee, Tien-I Bao 2017-10-24
9773676 Lithography using high selectivity spacers for pitch reduction Yu-Sheng Chang, Cheng-Hsiung Tsai, Chung-Ju Lee, Hai-Ching Chen, Hsiang-Huan Lee +5 more 2017-09-26
9741567 Method of forming multiple patterning spacer structures Chih Wei Lu, Chung-Ju Lee 2017-08-22
9735052 Metal lines for interconnect structure and method of manufacturing same Cheng-Hsiung Tsai, Carlos H. Diaz, Chung-Ju Lee, Tien-I Bao, Yung-Hsu Wu +1 more 2017-08-15
9728503 Via pre-fill on back-end-of-the-line interconnect layer Chao-Hsien Peng, Chi-Liang Kuo, Ming-Han Lee, Hsiang-Huan Lee 2017-08-08
9728485 Semiconductor device with interconnect structure having catalys layer Ming-Han Lee 2017-08-08
9721894 Semiconductor device and manufacturing method thereof Shih-Kang Fu, Hsien-Chang Wu, Li-Lin Su, Ming-Han Lee 2017-08-01
9721887 Method of forming metal interconnection Chao-Hsien Peng, Chih Wei Lu, Ming-Han Lee 2017-08-01
9716074 Wafer backside interconnect structure connected to TSVs Ming-Fa Chen, Wen-Chih Chiou 2017-07-25
9704806 Additional etching to increase via contact area Pei-Yi Lin, Chung-Ju Lee 2017-07-11
9685368 Interconnect structure having an etch stop layer over conductive lines Cheng-Hsiung Tsai, Chung-Ju Lee, Tien-I Bao 2017-06-20
9659864 Method and apparatus for forming self-aligned via with selectively deposited etching stop layer Yung-Hsu Wu, Hai-Ching Chen, Jung-Hsun Tsai, Tien-I Bao 2017-05-23
9653349 Semiconductor integrated circuit with nano gap Cheng-Hsiung Tsai, Chieh-Han Wu, Chung-Ju Lee 2017-05-16
9646932 Method for forming interconnect structure that avoids via recess Chao-Hsien Peng, Tsung-Min Huang, Hsiang-Huan Lee 2017-05-09
9627206 Method of double patterning lithography process using plurality of mandrels for integrated circuit applications Chung-Ju Lee, Hsin-Chieh Yao, Tien-I Bao, Yung-Hsu Wu 2017-04-18
9613856 Method of forming metal interconnection Shin-Yi Yang, Ming-Han Lee, Tz-Jun Kuo 2017-04-04
9607850 Self-aligned double spacer patterning process Cheng-Hsiung Tsai, Yung-Hsu Wu, Tsung-Min Huang, Chung-Ju Lee, Tien-I Bao 2017-03-28
9589890 Method for interconnect scheme Hsin-Chieh Yao, Carlos H. Diaz, Cheng-Hsiung Tsai, Chung-Ju Lee, Chien-Hua Huang +3 more 2017-03-07
9576814 Method of spacer patterning to form a target integrated circuit pattern Chieh-Han Wu, Cheng-Hsiung Tsai, Chung-Ju Lee, Ming-Feng Shieh, Ru-Gun Liu +1 more 2017-02-21
9564397 Interconnect structure and method of forming the same Cheng-Hsiung Tsai, Chung-Ju Lee, Hai-Ching Chen, Tien-I Bao 2017-02-07
9548241 Semiconductor device metallization systems and methods Hsiang-Huan Lee, Keith Kuang-Kuo Koai, Hai-Ching Chen, Tung-Ching Tseng, Wen-Cheng Yang +3 more 2017-01-17