Issued Patents 2017
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852915 | Etching apparatus | Wan-Yu Lee, Ying-Hao Kuo, Tien-I Bao | 2017-12-26 |
| 9831090 | Method and structure for semiconductor device having gate spacer protection layer | Chih Wei Lu, Chung-Ju Lee, Chien-Hua Huang, Tien-I Bao | 2017-11-28 |
| 9818690 | Self-aligned interconnection structure and method | Jung-Hsun Tsai, Chi-Lin Teng, Kai-Fang Cheng, Hsin-Yen Huang, Tien-I Bao +1 more | 2017-11-14 |
| 9799603 | Semiconductor device structure and method for forming the same | Kai-Fang Cheng, Chi-Lin Teng, Hsin-Yen Huang, Tien-I Bao, Jung-Hsun Tsai | 2017-10-24 |
| 9773676 | Lithography using high selectivity spacers for pitch reduction | Yu-Sheng Chang, Cheng-Hsiung Tsai, Chung-Ju Lee, Hsiang-Huan Lee, Ming-Feng Shieh +5 more | 2017-09-26 |
| 9709905 | System and method for dark field inspection | Bo-Jiun Lin, Hsin-Chieh Yao, Tien-I Bao | 2017-07-18 |
| 9659864 | Method and apparatus for forming self-aligned via with selectively deposited etching stop layer | Yung-Hsu Wu, Jung-Hsun Tsai, Shau-Lin Shue, Tien-I Bao | 2017-05-23 |
| 9651736 | Self-alignment due to wettability difference of an interface | Jay Lai, Ying-Hao Kuo, Tien-I Bao | 2017-05-16 |
| 9568677 | Waveguide structure and method for fabricating the same | Chun-Hao Tseng, Ying-Hao Kuo, Tien-I Bao | 2017-02-14 |
| 9564397 | Interconnect structure and method of forming the same | Cheng-Hsiung Tsai, Chung-Ju Lee, Shau-Lin Shue, Tien-I Bao | 2017-02-07 |
| 9548241 | Semiconductor device metallization systems and methods | Hsiang-Huan Lee, Shau-Lin Shue, Keith Kuang-Kuo Koai, Tung-Ching Tseng, Wen-Cheng Yang +3 more | 2017-01-17 |