| 6967756 |
Lithographic apparatus device manufacturing method and device manufactured thereby |
Antonius Johannes Josephus Van Dijsseldonk, Dominicus Jacobus Petrus Adrianus Franken |
2005-11-22 |
| 6952253 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Theodorus Marinus Modderman +7 more |
2005-10-04 |
| 6927403 |
Illumination system that suppresses debris from a light source |
Wolfgang Singer, Martin Antoni, Johannes Wangler, Wilhelm Egle, Vadim Yevgenyevich Banine |
2005-08-09 |
| 6906783 |
System for using a two part cover for protecting a reticle |
Santiago del Puerto, Andrew Massar, Duane P. Kish, Abdullah Alikhan, Woodrow J. Olson +1 more |
2005-06-14 |
| 6894261 |
Position measuring system for use in lithographic apparatus |
Thomas Josephus Maria Castenmiller, Andreas Ariens, Martinus Hendricus Hoeks, Patrick David Vogelsang, YimBun P. Kwan |
2005-05-17 |
| 6879374 |
Device manufacturing method, device manufactured thereby and a mask for use in the method |
Jan Evert Van Der Werf, Hans Meiling, Johannes Hubertus Josephina Moors, Martinus Hendrikus Antonius Leenders |
2005-04-12 |
| 6875992 |
Position measuring device, position measuring system, lithographic apparatus, and device manufacturing method |
Thomas Josephus Maria Castenmiller, Andreas Ariens, Martinus Hendricus Hoeks, Patrick David Vogelsang, YimBun P. Kwan |
2005-04-05 |
| 6870601 |
Lithographic apparatus and device manufacturing method |
Paulus Martinus Maria Liebregts, Arno Jan Bleeker, Harry Borggreve |
2005-03-22 |
| 6853440 |
Position correction in Y of mask object shift due to Z offset and non-perpendicular illumination |
Engelbertus A. F. van de Pasch, Marcel Hendrikus Maria Beems, Hendricus Johannes Maria Meijer, Daniel N. Galburt |
2005-02-08 |