Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6894261 | Position measuring system for use in lithographic apparatus | Andreas Ariens, Martinus Hendricus Hoeks, Patrick David Vogelsang, Erik Roelof Loopstra, YimBun P. Kwan | 2005-05-17 |
| 6875992 | Position measuring device, position measuring system, lithographic apparatus, and device manufacturing method | Andreas Ariens, Martinus Hendricus Hoeks, Patrick David Vogelsang, Erik Roelof Loopstra, YimBun P. Kwan | 2005-04-05 |
| 6856376 | Lithographic apparatus, apparatus cleaning method, device manufacturing method and device manufactured thereby | Gert-Jan Heerens, Sjoerd Nicolaas Lambertus Donders, Franciscus Andreas Cornelis Johannes Spanjers, Aschwin Lodewijk Hendricus Johannes Van Meer | 2005-02-15 |