Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6856376 | Lithographic apparatus, apparatus cleaning method, device manufacturing method and device manufactured thereby | Gert-Jan Heerens, Sjoerd Nicolaas Lambertus Donders, Franciscus Andreas Cornelis Johannes Spanjers, Thomas Josephus Maria Castenmiller | 2005-02-15 |