Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6956222 | Lithographic apparatus and method of manufacturing a device | Noud Jan Gilissen, Martinus Hendrikus Antonius Leenders | 2005-10-18 |
| 6856376 | Lithographic apparatus, apparatus cleaning method, device manufacturing method and device manufactured thereby | Gert-Jan Heerens, Franciscus Andreas Cornelis Johannes Spanjers, Aschwin Lodewijk Hendricus Johannes Van Meer, Thomas Josephus Maria Castenmiller | 2005-02-15 |