| 6977713 |
Lithographic apparatus and device manufacturing method |
Bernardus Antonius Johannes Luttikhuis, Pertrus Bartray, Wilhelmus Josephus Box, Marc Wilhelmus Maria Van Der Wijst |
2005-12-20 |
| 6956222 |
Lithographic apparatus and method of manufacturing a device |
Noud Jan Gilissen, Sjoerd Nicolaas Lambertus Donders |
2005-10-18 |
| 6940587 |
Lithographic apparatus and a measurement system |
Hans Van Der Laan, Johannes Jacobus Matheus Baselmans, Antonius Johannes Josephus Van Dijsseldonk, Johannes Hubertus Josephina Moors |
2005-09-06 |
| 6930760 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Jan Van Elp, Vadim Yevgenyevich Banine, Hugo Matthieu Visser, Levinus Pieter Bakker |
2005-08-16 |
| 6879374 |
Device manufacturing method, device manufactured thereby and a mask for use in the method |
Jan Evert Van Der Werf, Erik Roelof Loopstra, Hans Meiling, Johannes Hubertus Josephina Moors |
2005-04-12 |
| 6862075 |
Lithographic projection apparatus, device manufacturing method, and device manufacturing thereby |
Norbertus Benedictus Koster, Bastiaan Mertens, Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev, Vadim Yevgenyevich Banine |
2005-03-01 |