Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6933510 | Radiation source, lithographic apparatus, and device manufacturing method | Givi Georgievitch Zukavishvili, Vladimir Vital'evitch Ivanov, Evgenil Korob, Vadim Yevgenyevich Banine, Pavel Stanislavovich Antsiferov | 2005-08-23 |
| 6862075 | Lithographic projection apparatus, device manufacturing method, and device manufacturing thereby | Norbertus Benedictus Koster, Bastiaan Mertens, Martinus Hendrikus Antonius Leenders, Vladimir Vitalevitch Ivanov, Vadim Yevgenyevich Banine | 2005-03-01 |