Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6933510 | Radiation source, lithographic apparatus, and device manufacturing method | Givi Georgievitch Zukavishvili, Vladimir Vital'evitch Ivanov, Konstantin Nikolaevitch Koshelev, Vadim Yevgenyevich Banine, Pavel Stanislavovich Antsiferov | 2005-08-23 |