Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6933510 | Radiation source, lithographic apparatus, and device manufacturing method | Givi Georgievitch Zukavishvili, Vladimir Vital'evitch Ivanov, Konstantin Nikolaevitch Koshelev, Evgenil Korob, Pavel Stanislavovich Antsiferov | 2005-08-23 |
| 6930760 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Jan Van Elp, Martinus Hendrikus Antonius Leenders, Hugo Matthieu Visser, Levinus Pieter Bakker | 2005-08-16 |
| 6927403 | Illumination system that suppresses debris from a light source | Wolfgang Singer, Martin Antoni, Johannes Wangler, Wilhelm Egle, Erik Roelof Loopstra | 2005-08-09 |
| 6864958 | Lithographic apparatus and device manufacturing method | Arno Jan Bleeker | 2005-03-08 |
| 6862075 | Lithographic projection apparatus, device manufacturing method, and device manufacturing thereby | Norbertus Benedictus Koster, Bastiaan Mertens, Martinus Hendrikus Antonius Leenders, Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev | 2005-03-01 |
| 6838684 | Lithographic projection apparatus and particle barrier for use therein | Levinus Pieter Bakker, Frank Jeroen Pieter Schuurmans | 2005-01-04 |