Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6876440 | METHODS AND SYSTEMS TO COMPENSATE FOR A STITCHING DISTURBANCE OF A PRINTED PATTERN IN A MASKLESS LITHOGRAPHY SYSTEM UTILIZING OVERLAP OF EXPOSURE ZONES WITH ATTENUATION OF THE AERIAL IMAGE IN THE OVERLAP REGION | Wenceslao A. Cebuhar, Justin Kreuzer, Azat Latypov, Yuli Vladimirsky | 2005-04-05 |
| 6870601 | Lithographic apparatus and device manufacturing method | Paulus Martinus Maria Liebregts, Erik Roelof Loopstra, Harry Borggreve | 2005-03-22 |
| 6864958 | Lithographic apparatus and device manufacturing method | Vadim Yevgenyevich Banine | 2005-03-08 |