Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6965436 | System and method for calibrating a spatial light modulator array using shearing interferometry | Sherman K. Poultney | 2005-11-15 |
| 6963434 | System and method for calculating aerial image of a spatial light modulator | — | 2005-11-08 |
| 6876440 | METHODS AND SYSTEMS TO COMPENSATE FOR A STITCHING DISTURBANCE OF A PRINTED PATTERN IN A MASKLESS LITHOGRAPHY SYSTEM UTILIZING OVERLAP OF EXPOSURE ZONES WITH ATTENUATION OF THE AERIAL IMAGE IN THE OVERLAP REGION | Arno Jan Bleeker, Wenceslao A. Cebuhar, Justin Kreuzer, Yuli Vladimirsky | 2005-04-05 |
| 6847461 | System and method for calibrating a spatial light modulator array using shearing interferometry | Sherman K. Poultney | 2005-01-25 |