Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6965436 | System and method for calibrating a spatial light modulator array using shearing interferometry | Azat Latypov | 2005-11-15 |
| 6867846 | Tailored reflecting diffractor for EUV lithographic system aberration measurement | — | 2005-03-15 |
| 6847461 | System and method for calibrating a spatial light modulator array using shearing interferometry | Azat Latypov | 2005-01-25 |