Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6947120 | Illumination system particularly for microlithography | Wolfgang Singer, Johannes Wangler | 2005-09-20 |
| 6947124 | Illumination system particularly for microlithography | Wolfgang Singer, Johannes Wangler | 2005-09-20 |
| 6927403 | Illumination system that suppresses debris from a light source | Wolfgang Singer, Johannes Wangler, Wilhelm Egle, Vadim Yevgenyevich Banine, Erik Roelof Loopstra | 2005-08-09 |
| 6858853 | Illumination system particularly for microlithography | Wolfgang Singer, Johannes Wangler | 2005-02-22 |
| 6859328 | Illumination system particularly for microlithography | Jorg Schultz, Johannes Wangler, Karl-Hein Schuster, Udo Dinger, Wolfgang Singer +2 more | 2005-02-22 |
| 6840640 | Multi mirror system for an illumination system | Isabel Escudero-Sanz, Wolfgang Singer, Johannes Wangler, Jorg Schultz | 2005-01-11 |