Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6859328 | Illumination system particularly for microlithography | Johannes Wangler, Karl-Hein Schuster, Udo Dinger, Wolfgang Singer, Martin Antoni +2 more | 2005-02-22 |
| 6859515 | Illumination system, particularly for EUV lithography | Johannes Wangler | 2005-02-22 |
| 6840640 | Multi mirror system for an illumination system | Martin Antoni, Isabel Escudero-Sanz, Wolfgang Singer, Johannes Wangler | 2005-01-11 |