Issued Patents 2005
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6964485 | Collector for an illumination system with a wavelength of less than or equal to 193 nm | Wolfgang Singer | 2005-11-15 |
| 6947124 | Illumination system particularly for microlithography | Martin Antoni, Wolfgang Singer | 2005-09-20 |
| 6947120 | Illumination system particularly for microlithography | Martin Antoni, Wolfgang Singer | 2005-09-20 |
| 6927403 | Illumination system that suppresses debris from a light source | Wolfgang Singer, Martin Antoni, Wilhelm Egle, Vadim Yevgenyevich Banine, Erik Roelof Loopstra | 2005-08-09 |
| 6885434 | Diaphragm for an integrator unit | Markus Degünther | 2005-04-26 |
| 6864960 | Zoom system for an illumination device | Jess Koehler | 2005-03-08 |
| 6859515 | Illumination system, particularly for EUV lithography | Jorg Schultz | 2005-02-22 |
| 6859328 | Illumination system particularly for microlithography | Jorg Schultz, Karl-Hein Schuster, Udo Dinger, Wolfgang Singer, Martin Antoni +2 more | 2005-02-22 |
| 6858853 | Illumination system particularly for microlithography | Martin Antoni, Wolfgang Singer | 2005-02-22 |
| 6840640 | Multi mirror system for an illumination system | Martin Antoni, Isabel Escudero-Sanz, Wolfgang Singer, Jorg Schultz | 2005-01-11 |