Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6900946 | Zoom system, in particular, a zoom system for an illumination device of a microlithographic projection system | — | 2005-05-31 |
| 6864960 | Zoom system for an illumination device | Johannes Wangler | 2005-03-08 |