Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6947118 | Lithographic apparatus and method of manufacturing a device | — | 2005-09-20 |
| 6930760 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Jan Van Elp, Martinus Hendrikus Antonius Leenders, Vadim Yevgenyevich Banine, Hugo Matthieu Visser | 2005-08-16 |
| 6906788 | Lithographic projection apparatus with multiple suppression meshes | Frank Jeroen Pieter Schuurmans | 2005-06-14 |
| 6859259 | Lithographic projection apparatus and reflector assembly for use therein | Jeroen Jonkers, Frank Jeroen Pieter Schuurmans, Hugo Matthieu Visser | 2005-02-22 |
| 6838684 | Lithographic projection apparatus and particle barrier for use therein | Frank Jeroen Pieter Schuurmans, Vadim Yevgenyevich Banine | 2005-01-04 |