Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6930760 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Martinus Hendrikus Antonius Leenders, Vadim Yevgenyevich Banine, Hugo Matthieu Visser, Levinus Pieter Bakker | 2005-08-16 |
| 6864957 | Chuck, lithographic projection apparatus, method of manufacturing a chuck and device manufacturing method | Peter Theodorus Maria Giesen, Jacob Jan Van der Velde | 2005-03-08 |