Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6864957 | Chuck, lithographic projection apparatus, method of manufacturing a chuck and device manufacturing method | Jan Van Elp, Peter Theodorus Maria Giesen | 2005-03-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6864957 | Chuck, lithographic projection apparatus, method of manufacturing a chuck and device manufacturing method | Jan Van Elp, Peter Theodorus Maria Giesen | 2005-03-08 |