Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6862075 | Lithographic projection apparatus, device manufacturing method, and device manufacturing thereby | Norbertus Benedictus Koster, Martinus Hendrikus Antonius Leenders, Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev, Vadim Yevgenyevich Banine | 2005-03-01 |