Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6967756 | Lithographic apparatus device manufacturing method and device manufactured thereby | Erik Roelof Loopstra, Dominicus Jacobus Petrus Adrianus Franken | 2005-11-22 |
| 6940587 | Lithographic apparatus and a measurement system | Hans Van Der Laan, Johannes Jacobus Matheus Baselmans, Martinus Hendrikus Antonius Leenders, Johannes Hubertus Josephina Moors | 2005-09-06 |
| 6927004 | Mask for use in lithography, method of making a mask, lithographic apparatus, and device manufacturing method | Markus Franciscus Antonius Eurlings, Marcel Mathijs Theodore Marie Dierichs | 2005-08-09 |