Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6927004 | Mask for use in lithography, method of making a mask, lithographic apparatus, and device manufacturing method | Markus Franciscus Antonius Eurlings, Antonius Johannes Josephus Van Dijsseldonk | 2005-08-09 |