Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6927004 | Mask for use in lithography, method of making a mask, lithographic apparatus, and device manufacturing method | Antonius Johannes Josephus Van Dijsseldonk, Marcel Mathijs Theodore Marie Dierichs | 2005-08-09 |
| 6875545 | Method of removing assist features utilized to improve process latitude | Jang Fung Chen, Duan-Fu Stephen Hsu | 2005-04-05 |