Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6951701 | Method for improved lithographic patterning utilizing multiple coherency optimized exposures and high transmission attenuated PSM | Michael S. Hsu, Stephen Hsu, Thomas Laidig, Douglas Van Den Broeke | 2005-10-04 |
| 6920628 | Method and apparatus for defining mask patterns utilizing a spatial frequency doubling technique | Douglas Van Den Broeke | 2005-07-19 |
| 6915505 | Method and apparatus for performing rule-based gate shrink utilizing dipole illumination | Stephen Hsu, Noel Corcoran | 2005-07-05 |
| 6875545 | Method of removing assist features utilized to improve process latitude | Markus Franciscus Antonius Eurlings, Duan-Fu Stephen Hsu | 2005-04-05 |
| 6851103 | Method and apparatus for decomposing semiconductor device patterns into phase and chrome regions for chromeless phase lithography | Doug Van Den Broeke, Thomas Laidig, Kurt E. Wampler, Stephen Hsu | 2005-02-01 |