Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6951701 | Method for improved lithographic patterning utilizing multiple coherency optimized exposures and high transmission attenuated PSM | Michael S. Hsu, Thomas Laidig, Douglas Van Den Broeke, Jang Fung Chen | 2005-10-04 |
| 6915505 | Method and apparatus for performing rule-based gate shrink utilizing dipole illumination | Noel Corcoran, Jang Fung Chen | 2005-07-05 |
| 6851103 | Method and apparatus for decomposing semiconductor device patterns into phase and chrome regions for chromeless phase lithography | Doug Van Den Broeke, Jang Fung Chen, Thomas Laidig, Kurt E. Wampler | 2005-02-01 |