Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6951701 | Method for improved lithographic patterning utilizing multiple coherency optimized exposures and high transmission attenuated PSM | Michael S. Hsu, Stephen Hsu, Thomas Laidig, Jang Fung Chen | 2005-10-04 |
| 6920628 | Method and apparatus for defining mask patterns utilizing a spatial frequency doubling technique | Jang Fung Chen | 2005-07-19 |