Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6851103 | Method and apparatus for decomposing semiconductor device patterns into phase and chrome regions for chromeless phase lithography | Jang Fung Chen, Thomas Laidig, Kurt E. Wampler, Stephen Hsu | 2005-02-01 |