Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6940587 | Lithographic apparatus and a measurement system | Hans Van Der Laan, Antonius Johannes Josephus Van Dijsseldonk, Martinus Hendrikus Antonius Leenders, Johannes Hubertus Josephina Moors | 2005-09-06 |
| 6887625 | Assist features for use in lithographic projection | Markus Schluter, Donis Flagello, Robert John Socha | 2005-05-03 |
| 6855486 | Lithographic method and apparatus | Jozef Marie Finders, Donis Flagello, Igor Petrus Maria Bouchoms | 2005-02-15 |