Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6887625 | Assist features for use in lithographic projection | Johannes Jacobus Matheus Baselmans, Markus Schluter, Donis Flagello | 2005-05-03 |
| 6871337 | Illumination optimization for specific mask patterns | — | 2005-03-22 |